摘要: Ultrafast laser filamentation results from the interaction of ultrafast laser with Kerr media. During filamentary propagation, the transparent medium is altered by numerous linear and nonlinear effects of ultrashort laser pulses. Filamentation can cause material modification in solids through laser energy deposition and ionization processes, which creates a new opportunity for ultrafast laser processing of materials when combined with filamentary propagation characteristics, such as intensity champing and long propagation distance. This paper reviews the research on ultrafast laser filamentation in solids for micro- and nano-processing, including the fundamental physics, filamentation characteristics, and applications in solids for ultrafast laser filamentation-induced processing. Additionally highlighted are the difficulties and potential applications for solid-based filamentation-induced processing.