Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Zhenyuan Lin; Minghui Hong

doi:10.34133/2021/9783514

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Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Review Article | Updated：2024-10-22

- Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale
- 超快科学（英文） 2021年1卷第3期
- Affiliations：
  
  a Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3,Singapore
- Author bio：
- Funds：
  
  Academic Research Fund Tier 2, Ministry of Education - Singapore (MOE2019-T2-2-147).
- DOI：10.34133/2021/9783514
  中图分类号：
- 纸质出版日期：2021，
- Accepted：
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Zhenyuan Lin, Minghui Hong. 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. 超快科学, 2021(3).

Zhenyuan Lin，Minghui Hong, . 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. Ultrafast Science, 2021(3).
Zhenyuan Lin, Minghui Hong. 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. 超快科学, 2021(3). DOI： 10.34133/2021/9783514

Zhenyuan Lin，Minghui Hong, . 2021: Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale. Ultrafast Science, 2021(3). DOI： 10.34133/2021/9783514

摘要

As a noncontact strategy with flexible tools and high efficiency

laser precision engineering is a significant advanced processing way for high-quality micro-/nanostructure fabrication

especially to achieve novel functional photoelectric structures and devices. For the microscale creation

several femtosecond laser fabrication methods

including multiphoton absorption

laser-induced plasma-assisted ablation

and incubation effect have been developed. Meanwhile

the femtosecond laser can be combined with microlens arrays and interference lithography techniques to achieve the structures in submicron scales. Down to nanoscale feature sizes

advanced processing strategies

such as near-field scanning optical microscope

atomic force microscope

and microsphere

are applied in femtosecond laser processing and the minimum nanostructure creation has been pushed down to ~25 nm due to near-field effect. The most fascinating femtosecond laser precision engineering is the possibility of large-area

high-throughput

and far-field nanofabrication. In combination with special strategies

including dual femtosecond laser beam irradiation

~15 nm nanostructuring can be achieved directly on silicon surfaces in far field and in ambient air. The challenges and perspectives in the femtosecond laser precision engineering are also discussed.

Abstract

As a noncontact strategy with flexible tools and high efficiency

laser precision engineering is a significant advanced processing way for high-quality micro-/nanostructure fabrication

especially to achieve novel functional photoelectric structures and devices. For the microscale creation

several femtosecond laser fabrication methods

including multiphoton absorption

laser-induced plasma-assisted ablation

and incubation effect have been developed. Meanwhile

the femtosecond laser can be combined with microlens arrays and interference lithography techniques to achieve the structures in submicron scales. Down to nanoscale feature sizes

advanced processing strategies

such as near-field scanning optical microscope

atomic force microscope

and microsphere

high-throughput

and far-field nanofabrication. In combination with special strategies

including dual femtosecond laser beam irradiation

~15 nm nanostructuring can be achieved directly on silicon surfaces in far field and in ambient air. The challenges and perspectives in the femtosecond laser precision engineering are also discussed.

关键词

Keywords

references

Wang, S., Zhou, X., Zheng, J. et al. Optimization of GeSn nanostructures via tuning of femtosecond laser parameters. Applied Surface Science, 2025. DOI:10.1016/j.apsusc.2024.161153.

Yin, J., Hong, M. Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication. Optics and Laser Technology, 2024. DOI:10.1016/j.optlastec.2024.111348.

Nedyalkov, N., Aleksandrov, L., Avramova, I. et al. Preserving luminescence properties in ultrashort laser ablation-induced bulk material to nanoparticles transformation of Eu3+-doped ZnO-B2O3-WO3-Nb2O5 glass. Optics and Laser Technology, 2024. DOI:10.1016/j.optlastec.2024.111331.

Lin, C., Yang, Y. Effect of tool vibration trajectory on vibration-assisted diamond-cutting structural color. International Journal of Mechanical Sciences, 2024. DOI:10.1016/j.ijmecsci.2024.109632.

Lebrun, N., Dupla, F., Bruhier, H. et al. Metallic glasses for biological applications and opportunities opened by laser surface texturing: A review. Applied Surface Science, 2024. DOI:10.1016/j.apsusc.2024.160617.

Baba, M.A., Lemieszek, B., Sriubas, M. et al. Femtosecond laser ablated trench array for improving performance of commercial solid oxide cell. Journal of Power Sources, 2024. DOI:10.1016/j.jpowsour.2024.235128.

Cheng, H., Zhang, Z., Hu, X. et al. Low noise operation of an all polarization-maintaining figure-9 Er:fiber laser with near-zero cavity dispersion. Optical Fiber Technology, 2024. DOI:10.1016/j.yofte.2024.103892.

Liu, J., Jiang, Q., Yan, J. et al. Femtosecond pulse train-facilitated periodic nanostructuring on TiN films via laser-oxidation. Optics and Laser Technology, 2024. DOI:10.1016/j.optlastec.2024.111189.

Su, Y., Zheng, L., Lao, Z. et al. Femtosecond laser writing of durable open microfluidic channels via a mode-switchable strategy. Applied Physics Letters, 2024, 125(10): 101602. DOI:10.1063/5.0221736.

Ghofrani, S., Abouei Mehrizi, A., Nasrollahi, V. et al. Novel Cardiovascular Stent Based on Hibiscus-Aestivation-Inspired Auxetic Unit Cell. International Journal of Mechanical Sciences, 2024. DOI:10.1016/j.ijmecsci.2024.109428.

Huang, X., Li, X., Chen, E. et al. Power-Guided Asymmetrical Vector Dissipative Soliton Molecules in a Compact Fiber Resonator. IEEE Journal of Selected Topics in Quantum Electronics, 2024, 30(5): 1-6. DOI:10.1109/JSTQE.2023.3319342.

Xia, T., Zhao, H., Zhu, S. et al. Generation of 8-fs and 13-nJ pulse from a Yb-fiber system with nonlinear-pulse-compression. Optics Express, 2024, 32(18): 32396-32407. DOI:10.1364/OE.530201.

Ren, G., Ito, Y., Yoshizaki, R. et al. Ultrafast dynamics and internal processing mechanism of silica glass under double-pulse femtosecond laser irradiation. Optics Express, 2024, 32(18): 32408-32420. DOI:10.1364/OE.530465.

Timchenko, V., Kreinovich, V., Kondratenko, Y. et al. Effectiveness evaluations of optical color fuzzy computing. Research Tendencies and Prospect Domains for AI Development and Implementation, 2024..

Li, Y., Xiao, K., Li, Z. et al. Femtosecond Laser Direct Writing of Bent Waveguides with High Curvature and Low Loss | [大曲率低损耗弯曲波导的飞秒激光直写]. Zhongguo Jiguang/Chinese Journal of Lasers, 2024, 51(16): 1602403. DOI:10.3788/CJL231264.

Minin, O.V., Minin, I.V. Experimental Demonstration of the Microprocessing of the Polystyrene Surface Using a Photonic Hook. JETP Letters, 2024, 120(2): 146-150. DOI:10.1134/S002136402460174X.

Ni, J., Huang, X., Zhang, Z. et al. Wettability-Oriented Laser Microgrooving Process on Cemented Carbide Surface. Materials, 2024, 17(14): 3423. DOI:10.3390/ma17143423.

Bryukhanov, I.A., Chaikovskii, D. Role of solid solution strengthening on shock wave compression of copper crystals. Journal of Applied Physics, 2024, 135(22): 225902. DOI:10.1063/5.0203961.

Orecchia, D., Maffini, A., Zavelani-Rossi, M. et al. Versatile Synthesis of Nanofoams through Femtosecond Pulsed Laser Deposition. Small Structures, 2024, 5(6): 2300560. DOI:10.1002/sstr.202300560.

Wang, P., Kong, X., Qi, F. et al. Critical pulse in multi-shot femtosecond laser ablation on metallic surfaces. Nanotechnology, 2024, 35(21): 215301. DOI:10.1088/1361-6528/ad2bcf.

Lu, X., Li, S., Yan, M. et al. Organic dye-loaded reduced titanium dioxide as a broadband saturable absorber for ultrafast fiber lasers. RSC Advances, 2024, 14(17): 11728-11733. DOI:10.1039/d3ra08925h.

Alsaigh, R.A.. Enhancement of Surface Properties Using Ultrashort-Pulsed-Laser Texturing: A Review. Crystals, 2024, 14(4): 353. DOI:10.3390/cryst14040353.

Chen, M., Wang, C., Li, K. et al. Application of Femtosecond Laser Processing Method in the Sustainable Conservation of Stone Cultural Relics: An Example of Green Schist in Wudang Mountain, China. Sustainability (Switzerland), 2024, 16(8): 3169. DOI:10.3390/su16083169.

Dong, J., Yang, Y., Zeng, Y. et al. Real-time spectroscopy of modulation-instability-mediated optical wave breaking in normal dispersion. Optics and Lasers in Engineering, 2024. DOI:10.1016/j.optlaseng.2024.108034.

Shin, S., Lee, W., Kab Park, J. Wavelength selection for femtosecond laser processing of materials: Comparison of ablation efficiency and surface quality. Optics and Laser Technology, 2024. DOI:10.1016/j.optlastec.2023.110428.

Zhang, L., Wang, C., Zhang, C. et al. High-Throughput Two-Photon 3D Printing Enabled by Holographic Multi-Foci High-Speed Scanning. Nano Letters, 2024, 24(8): 2671-2679. DOI:10.1021/acs.nanolett.4c00505.

Geng, J., Yan, J., Shi, L. s-Polarized Laser Oblique Incidence Induces“Leaf Vein-Like” Self-Organizing Stripe Structures | [s 偏振激光斜入射诱导类“叶脉”状自组织条纹结构]. Laser and Optoelectronics Progress, 2024, 61(3): 0314001. DOI:10.3788/LOP232621.

Lou, M., Tan, D. Photonic Topological Insulator: Ultrafast-Laser Direct-Writing Engineering and Applications (Invited) | [光子拓扑绝缘体：超快激光直写加工与应用（特邀）]. Zhongguo Jiguang/Chinese Journal of Lasers, 2024, 51(4): 0402401. DOI:10.3788/CJL231385.

Wang, S., Yang, J., Deng, G. et al. Femtosecond Laser Direct Writing of Flexible Electronic Devices: A Mini Review. Materials, 2024, 17(3): 557. DOI:10.3390/ma17030557.

Guo, Y., Zhao, H. Femtosecond laser processed superhydrophobic surface. Journal of Manufacturing Processes, 2024. DOI:10.1016/j.jmapro.2023.12.005.

Liang, C., Zhu, Z., Lin, W. et al. Synchronized Two-Color Mode-Locked Fiber Laser Source With GHz Repetition Rate. Journal of Lightwave Technology, 2024, 42(2): 802-808. DOI:10.1109/JLT.2023.3319370.

Wang, Y., Li, Z., Allegre, O. et al. Optical manipulation of ultrashort laser pulses for applications in challenging environments. Procedia CIRP, 2024. DOI:10.1016/j.procir.2024.08.205.

Gautam, K., Gogoi, D., Donarld Kongnyui, T. et al. Laser-Assisted Selective Surface Metallization of Polymer Substrates for Electronics Applications: A Review. Journal of Physics: Conference Series, 2024, 2818(1): 012029. DOI:10.1088/1742-6596/2818/1/012029.

Wang, J., Song, Y., Dong, B. et al. Femtosecond laser controllable annealing for color centers based on ion-implanted silicon carbide substrate. Ceramics International, 2024. DOI:10.1016/j.ceramint.2024.09.009.

Chen, B., Xie, P., Zhao, Z. et al. Ultrafast Laser Writing of Liquid Crystal Waveguides. Ultrafast Science, 2024. DOI:10.34133/ultrafastscience.0065.

Phengdaam, A., Sitpathom, N., Hong, M. et al. Influence of Aluminum Pillar Nanostructures on Thin-Film Organic Solar Cells. Physica Status Solidi (A) Applications and Materials Science, 2024. DOI:10.1002/pssa.202400221.

Rodríguez-Vidal, E., Molinuevo, J., Alonso, V. et al. Icing performance of superhydrophobic aluminum surfaces by ultrashort laser pulses. Proceedings of SPIE - The International Society for Optical Engineering, 2024. DOI:10.1117/12.3021114.

Wang, X., Fan, X., Liu, Y. et al. 3D Nanolithography via Holographic Multi-Focus Metalens. Laser and Photonics Reviews, 2024. DOI:10.1002/lpor.202400181.

Duan, R., Li, L., Zeng, X. et al. Liquid crystal elastomer micro-structures and their applications. Chinese Journal of Liquid Crystals and Displays, 2024, 39(3): 266-277. DOI:10.37188/CJLCD.2023-0404.

Clady, R., Ferré, A., Peyrusse, O. et al. Kα X-ray source size based on high-intensity femtosecond laser-solid interaction: generation and applications. Proceedings of SPIE - The International Society for Optical Engineering, 2024. DOI:10.1117/12.3012757.

Ganjali, M., Ghalandarzadeh, A., Ganjali, M. Surface Strategies and Classification of Biomaterials. Surface Engineering of Biomaterials Synthesis and Processing Techniques, 2024. DOI:10.1201/9781003429920-28.

Yong, J., Wu, D. Bioinspired Controlling the Surface Wettability of Materials by Femtosecond Laser: Current Progress and Challenges (Invited) | [飞秒激光仿生调控材料表面浸润性：当前进展与挑战（特邀）]. Zhongguo Jiguang/Chinese Journal of Lasers, 2024, 51(1): 0102002. DOI:10.3788/CJL231364.

Liu, K., Lin, Z., Han, B. et al. Non-volatile dynamically switchable color display via chalcogenide stepwise cavity resonators. Opto-Electronic Advances, 2024, 7(1): 230033. DOI:10.29026/oea.2024.230033.

Li, X., Huang, X., Li, G. et al. MOFs-derived hierarchical NiO-Co3O4 for versatile pulses generation. Infrared Physics and Technology, 2024. DOI:10.1016/j.infrared.2023.105102.

Luo, W., Sun, P., Wu, Z. et al. Heterostructure nanocluster MOF-derived Ag-CuO: An emerging material for harmonic soliton pulses generation. Infrared Physics and Technology, 2024. DOI:10.1016/j.infrared.2023.105052.

Zhang, N., Wang, M., Ban, M. et al. Femtosecond laser drilling 100 μm diameter micro holes with aspect ratios > 20 in a Nickel based superalloy. Journal of Materials Research and Technology, 2024. DOI:10.1016/j.jmrt.2023.12.049.

Zhang, Z., Yang, Z., Wang, C. et al. Accelerating ultrashort pulse laser micromachining process comprehensive optimization using a machine learning cycle design strategy integrated with a physical model. Journal of Intelligent Manufacturing, 2024, 35(1): 449-465. DOI:10.1007/s10845-022-02058-0.

Xiu, H., Fan, Y., Lin, W. et al. 1200-W all polarization-maintaining fiber GHz-femtosecond-pulse laser with good beam quality. Optics Express, 2023, 31(25): 41940-41951. DOI:10.1364/OE.506631.

Papadaki, H., Kaselouris, E., Bakarezos, M. et al. A Computational Study of Solid Si Target Dynamics under ns Pulsed Laser Irradiation from Elastic to Melting Regime. Computation, 2023, 11(12): 240. DOI:10.3390/computation11120240.

Zhang, Y., Wu, D., Zhang, Y. et al. Femtosecond laser direct writing of functional stimulus-responsive structures and applications. International Journal of Extreme Manufacturing, 2023, 5(4): 042012. DOI:10.1088/2631-7990/acf798.

Ren, B., Arkhipova, A.A., Zhang, Y. et al. Observation of nonlinear disclination states. Light: Science and Applications, 2023, 12(1): 194. DOI:10.1038/s41377-023-01235-x.

Liang, C., Li, Z., Wang, C. et al. Laser drilling of alumina ceramic substrates: A review. Optics and Laser Technology, 2023. DOI:10.1016/j.optlastec.2023.109828.

Zhang, B., Wang, Z., Tan, D. et al. Ultrafast laser-induced self-organized nanostructuring in transparent dielectrics: fundamentals and applications. PhotoniX, 2023, 4(1): 24. DOI:10.1186/s43074-023-00101-8.

Lin, S., Liang, Y., Zhang, J. et al. Controllable flatbands via non-Hermiticity. Applied Physics Letters, 2023, 123(22): 221103. DOI:10.1063/5.0174456.

Lee, J., Park, S.J., Han, S.C. et al. Enhanced mechanical property through high-yield fabrication process with double laser scanning method in two-photon lithography. Materials and Design, 2023. DOI:10.1016/j.matdes.2023.112389.

Hu, X., Lin, W., Ma, Y. et al. Manipulating the Spectral-Temporal Characteristics of Multi-GHz Ultrashort Pulses by Leveraging the Nonlinear Phase Modulation and CW-Seeded Four-Wave Mixing. IEEE Journal of Selected Topics in Quantum Electronics, 2023, 29(6): 5101208. DOI:10.1109/JSTQE.2023.3262161.

Xu, H., Huang, Y., Chen, X. et al. Suppression of polarization instability in ultrashort Fabry-Pérot fiber laser. Applied Physics Letters, 2023, 123(17): 171103. DOI:10.1063/5.0171770.

Ryoo, G., Lee, B., Shin, S. et al. Laser-Assisted Interfacial Engineering for High-Performance All-Solid-State Batteries. ChemElectroChem, 2023, 10(20): e202300349. DOI:10.1002/celc.202300349.

Mao, N., Enrique, P.D., Peng, P. Pulsed laser ablation of electrically insulated features in thin NiCr films. International Journal of Advanced Manufacturing Technology, 2023, 128(11-12): 5167-5177. DOI:10.1007/s00170-023-12271-7.

Wu, J., Gao, K., Chen, C. et al. Research Progress on Glass⁃Based Multi⁃dimensional Optical Storage Technology | [玻璃多维光存储技术研究进展]. Zhongguo Jiguang/Chinese Journal of Lasers, 2023, 50(18): 1813002. DOI:10.3788/CJL230693.

Zhang, Y., Li, Z., Wang, T. et al. Spectral manipulation in a high-power ultrafast fiber laser system generating ultrashort pulses with GHz repetition rate. Chinese Optics Letters, 2023, 21(9): 091401. DOI:10.3788/COL202321.091401.

Li, J., Zheng, K., Sun, W. et al. Low fluorescence crosstalk patterning of quantum dots based on laser drilling and micropore filling. Applied Physics Letters, 2023, 123(10): 101101. DOI:10.1063/5.0161855.

Ren, B., Kartashov, Y.V., Maczewsky, L.J. et al. Theory of nonlinear corner states in photonic fractal lattices. Nanophotonics, 2023, 12(19): 3829-3838. DOI:10.1515/nanoph-2023-0443.

Jia, Y., Chen, F. Recent progress on femtosecond laser micro-/nano-fabrication of functional photonic structures in dielectric crystals: A brief review and perspective. APL Photonics, 2023, 8(9): 090901. DOI:10.1063/5.0160067.

Li, Z., Yang, Z., Jia, X. et al. Numerical analysis of the effect of temporal and/or spatial shaping on the ms/ns combined pulse laser drilling performance of alumina ceramic. Optics and Laser Technology, 2023. DOI:10.1016/j.optlastec.2023.109481.

Ding, T., Wang, J., Xiao, Z. et al. Micro/nano hierarchical structure of titanium surface promotes MC3T3-E1 adhesion proliferation and drug loading potential evaluation. Journal of Prevention and Treatment for Stomatological Diseases, 2023, 31(8): 543-551. DOI:10.12016/j.issn.2096-1456.2023.08.002.

Lin, Z., Ji, L., Wang, W. Precision machining of single crystal diamond cutting tool via picosecond laser irradiation. International Journal of Refractory Metals and Hard Materials, 2023. DOI:10.1016/j.ijrmhm.2023.106226.

Gou, X., Huo, J., Yang, Q. et al. How to control the uniform micro bubbles generation on underwater superaerophobic surface?. Optics and Laser Technology, 2023. DOI:10.1016/j.optlastec.2023.109308.

Cui, J., Xie, X., Huang, Y. et al. Narrow Pulse Width Laser Induced Reverse Selective Removal of Metal Thin Films to Fabricate Microcircuits (Invited) | [窄脉宽激光诱导背向选择性去除金属薄膜制备微电路 (特邀)]. Guangzi Xuebao/Acta Photonica Sinica, 2023, 52(7): 0752306. DOI:10.3788/gzxb20235207.0752306.

Xu, Y., Zhang, Y., Jiang, Q. et al. High Quality Near-subwavelength Ripples on Si Induced by Femtosecond Pulse Train Output from Fabry-Perot Cavity (Invited) | [基于法布里 -珀罗腔产生飞秒激光脉冲串在硅表面诱导高质量亚波长周期条纹(特邀)]. Guangzi Xuebao/Acta Photonica Sinica, 2023, 52(7): 0752301. DOI:10.3788/gzxb20235207.0752301.

Shi, L., Geng, J., Qiu, M. Influence of Scanning Direction on the Quality of LIPSS on Metal-Si Hybrid Films（Invited） | [扫描方向对金属和硅复合薄膜表面激光诱导自组织加工质量的影响（特邀）]. Guangzi Xuebao/Acta Photonica Sinica, 2023, 52(7): 0752303. DOI:10.3788/gzxb20235207.0752303.

Luo, X., Li, M., Mao, J. Theoretical Simulation and Preparation of Anti-reflection Characteristics of Zinc Sulfide Surface Microstructure | [硫化锌表面微结构抗反射特性的理论模拟及制备]. Guangzi Xuebao/Acta Photonica Sinica, 2023, 52(7): 0752308. DOI:10.3788/gzxb20235207.0752308.

Liu, Y., Zhu, X., Jin, C. et al. High-quality Subwavelength Grating Structures Fabrication on Fused Silica Surfaces by Femtosecond Laser | [融石英表面高质量亚波长光栅结构的飞秒激光加工]. Guangzi Xuebao/Acta Photonica Sinica, 2023, 52(7): 0752307. DOI:10.3788/gzxb20235207.0752307.

Shen, S., Kartashov, Y.V., Li, Y. et al. Floquet Edge Solitons in Modulated Trimer Waveguide Arrays. Physical Review Applied, 2023, 20(1): 014012. DOI:10.1103/PhysRevApplied.20.014012.

Yan, X., Zhang, L., Zhu, J. et al. Comparison of high average-power femtosecond green and ultraviolet laser emissions generated by K3B6O10Br and K3B6O10Cl nonlinear crystals. Optik, 2023. DOI:10.1016/j.ijleo.2023.170928.

Tian, Y., Wang, Y., Belić, M.R. et al. Vector valley Hall edge solitons in distorted type-II Dirac photonic lattices. Optics Express, 2023, 31(13): 20812-20824. DOI:10.1364/OE.491719.

Pang, J., Jian, Y.U., Yang, H. et al. Non-uniform droplet deposition on femtosecond laser patterned superhydrophobic/superhydrophilic SERS substrates for high-sensitive detection. Optics Express, 2023, 31(12): 19886-19896. DOI:10.1364/OE.491434.

Zhong, L., Wang, Y., Tan, D. et al. Toward 3D Integration of Highly See-Through Photonic Circuits in Glass. Laser and Photonics Reviews, 2023, 17(6): 2200767. DOI:10.1002/lpor.202200767.

Wang, C., Rao, R., Cai, Z. et al. Microclaw Array Fabricated by Single Exposure of Femtosecond Airy Beam and Self-Assembly for Regulating Cell Migratory Plasticity. ACS Nano, 2023, 17(10): 9025-9038. DOI:10.1021/acsnano.2c11577.

Lian, M., Su, Y., Liu, K. et al. Nonvolatile Switchable Broadband Polarization Conversion with Wearable Terahertz Chalcogenide Metamaterials. Advanced Optical Materials, 2023, 11(9): 2202439. DOI:10.1002/adom.202202439.

Hao, Z., Zhou, Y., Wu, B. et al. Improving resolution of superlens based on solid immersion mechanism. Chinese Physics B, 2023, 32(6): 064211. DOI:10.1088/1674-1056/ac8726.

Sun, K., Li, X., Tan, D. et al. Pure Blue Perovskites Nanocrystals in Glass: Ultrafast Laser Direct Writing and Bandgap Tuning. Laser and Photonics Reviews, 2023, 17(5): 2200902. DOI:10.1002/lpor.202200902.

Byram, C., Moram, S.S.B., Banerjee, D. et al. Review of ultrafast laser ablation for sensing and photonic applications. Journal of Optics (United Kingdom), 2023, 25(4): 043001. DOI:10.1088/2040-8986/acbc31.

Huang, Y., Zhou, Y., Li, J. et al. Femtosecond laser surface modification of 4H-SiC improves machinability. Applied Surface Science, 2023. DOI:10.1016/j.apsusc.2023.156436.

Wang, G.-Y., Bai, C., Mai, H.-J. et al. Yb:CaYAlO4 regenerative amplifier | [Yb:CaYAlO4 再生放大器]. Wuli Xuebao/Acta Physica Sinica, 2023, 72(5): 054204. DOI:10.7498/aps.72.20222141.

Yan, Q., Peng, B., Wang, L. et al. Research on Laser Cold Machining Hole Penetration Spectroscopy Detection Technology | [激光冷加工孔穿透光谱检测技术研究]. Guangzi Xuebao/Acta Photonica Sinica, 2023, 52(3): 0352119. DOI:10.3788/gzxb20235203.0352119.

Chen, Z., Zhou, R., Hong, M. Enhanced anti-icing performance via bio-inspired papaver radicatum structuring. Journal of Materials Research and Technology, 2023. DOI:10.1016/j.jmrt.2023.02.035.

Zhang, Y., Wang, X., Yan, K. et al. Laser Micro/Nano-Structuring Pushes Forward Smart Sensing: Opportunities and Challenges. Advanced Functional Materials, 2023, 33(8): 2211272. DOI:10.1002/adfm.202211272.

Wang, S., Zhang, F., Yang, Q. et al. Chalcogenide Glass IR Artificial Compound Eyes Based on Femtosecond Laser Microfabrication. Advanced Materials Technologies, 2023, 8(2): 2200741. DOI:10.1002/admt.202200741.

Geng, J., Shi, L., Liu, J. et al. Laser-induced deep-subwavelength periodic nanostructures with large-scale uniformity. Applied Physics Letters, 2023, 122(2): 021104. DOI:10.1063/5.0138290.

Wang, H., Zhang, D., Wei, Z. et al. Enhancing Al2O3-7A52 brazed joints by femtosecond laser surface machining of periodic alumina structure. Processing and Application of Ceramics, 2023, 17(4): 436-445. DOI:10.2298/PAC2304436W.

Yan, T., Ji, L. Ultrafast Laser Filamentation in Transparent Solids. Ultrafast Science, 2023. DOI:10.34133/ULTRAFASTSCIENCE.0023.

Arkhipova, A.A., Zhang, Y., Kartashov, Y.V. et al. Observation of π solitons in oscillating waveguide arrays. Science Bulletin, 2023. DOI:10.1016/j.scib.2023.07.048.

Lin, Z., Liu, K., Cao, T. et al. Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption. Opto-Electronic Advances, 2023, 6(6): 230029. DOI:10.29026/oea.2023.230029.

Yu, J., Yang, H., Wu, J. et al. Ultrafast laser fabrication of surface-enhanced Raman scattering sensors | [超快激光制造表面增强拉曼散射传感器]. Guangdian Gongcheng/Opto-Electronic Engineering, 2023, 50(3): 220333. DOI:10.12086/oee.2023.220333.

Zhou, W., Yan, W., Wang, J. et al. Gamma-ray Vortex Burst in Nonlinear Thomson Scattering with Refocusing Spiral Plasma Mirror. Ultrafast Science, 2023. DOI:10.34133/ultrafastscience.0005.

Mansor, M., Zainol Abidin, N.H., Mohd Yusoff, N. et al. Tungsten trioxide nanocomposite for conventional soliton and noise-like pulse generation in anomalous dispersion laser cavity. Nanotechnology Reviews, 2023, 12(1): 20220535. DOI:10.1515/ntrev-2022-0535.

Xu, K., Huang, L., Xu, S. Line-shaped laser lithography for efficient fabrication of large-area subwavelength nanogratings. Optica, 2023, 10(1): 97-104. DOI:10.1364/OPTICA.472730.

Cao, G., Lin, H., Jia, B. Broadband Diffractive Graphene Orbital Angular Momentum Metalens by Laser Nanoprinting. Ultrafast Science, 2023. DOI:10.34133/ultrafastscience.0018.

Krajewski, S.J., Grochała, D., Tomków, J. et al. Analysis of the Surface Stereometry of Alloyed Austenitic Steel after Fibre Laser Cutting using Confocal Microscopy. Coatings, 2023, 13(1): 15. DOI:10.3390/coatings13010015.

Apostolova, I., Apostolov, A., Wesselinowa, J. Magnetic, Phonon and Optical Properties of Transition Metal and Rare Earth Ion Doped ZnS Nanoparticles. Nanomaterials, 2023, 13(1): 79. DOI:10.3390/nano13010079.

Lu, C., Ge, Y., Luo, M. et al. Optical Nonlinearity of Emerging ZrS2 and HfS2 Semiconductors. Annalen der Physik, 2023, 535(1): 2200309. DOI:10.1002/andp.202200309.

Pang, L., Zhao, M., Zhao, Q. et al. GaSb Film is a Saturable Absorber for Dissipative Soliton Generation in a Fiber Laser. ACS Applied Materials and Interfaces, 2022, 14(50): 55971-55978. DOI:10.1021/acsami.2c17738.

Geng, J., Yan, W., Shi, L. et al. Quasicylindrical Waves for Ordered Nanostructuring. Nano Letters, 2022, 22(23): 9658-9663. DOI:10.1021/acs.nanolett.2c03851.

An, M., Pan, Z., Li, X. et al. Co-MOFs as Emerging Pulse Modulators for Femtosecond Ultrafast Fiber Laser. ACS Applied Materials and Interfaces, 2022, 14(48): 53971-53980. DOI:10.1021/acsami.2c10217.

Miloshevsky, G.. Ultrafast laser matter interactions: modeling approaches, challenges, and prospects. Modelling and Simulation in Materials Science and Engineering, 2022, 30(8): 083001. DOI:10.1088/1361-651X/ac8abc.

Zhang, C., Li, X., Han, Y. et al. The generation of broadband photosource in fiber amplifier with different seed lasers - soliton and dissipative soliton pulse. Optics and Laser Technology, 2022. DOI:10.1016/j.optlastec.2022.108450.

Wang, C., Zhang, Z., Jing, X. et al. Optimization of multistage femtosecond laser drilling process using machine learning coupled with molecular dynamics. Optics and Laser Technology, 2022. DOI:10.1016/j.optlastec.2022.108442.

Geng, J., Yan, W., Shi, L. et al. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light: Science and Applications, 2022, 11(1): 189. DOI:10.1038/s41377-022-00883-9.

Tan, J.-W., Wang, G., Zhao, G.-X. et al. Femtosecond laser hybrid processing strategy of transparent hard and brittle materials. Frontiers in Chemistry, 2022. DOI:10.3389/fchem.2022.1082738.

Li, X., Tan, D., Liu, Y. et al. Ultrafast Laser Direct Writing of Nanocrystals in Glass and Applications | [超快激光在玻璃内部直写纳米晶及其应用]. Bulletin of the Chinese Ceramic Society, 2022, 41(11): 3781-3794..

Chen, Z., Jiang, L., Lian, Y. et al. Enhancement of ablation and ultrafast electron dynamics observation of nickel-based superalloy under double-pulse ultrashort laser irradiation. Journal of Materials Research and Technology, 2022. DOI:10.1016/j.jmrt.2022.11.005.

Geng, J., Shi, L., Sun, X. et al. Artificial Seeds-Regulated Femtosecond Laser Plasmonic Nanopatterning. Laser and Photonics Reviews, 2022, 16(11): 2200232. DOI:10.1002/lpor.202200232.

Butkus, A., Skliutas, E., Gailevičius, D. et al. Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator | [基于VIS光振荡器的飞秒激光直写三维微/纳米光刻技术]. Journal of Central South University, 2022, 29(10): 3270-3276. DOI:10.1007/s11771-022-5153-z.

Moghtaderifard, S., Soldera, M., Lasagni, A.F. Modelling and Validation of Microstructure Replication on Aluminum Foils from Laser-Patterned Stamps. Journal of Laser Micro Nanoengineering, 2022, 17(2): 94-102. DOI:10.2961/jlmn.2022.02.2004.

Yu, J., Wu, J., Yang, H. et al. Extremely Sensitive SERS Sensors Based on a Femtosecond Laser-Fabricated Superhydrophobic/-philic Microporous Platform. ACS Applied Materials and Interfaces, 2022, 14(38): 43877-43885. DOI:10.1021/acsami.2c10381.

Tan, D., Sun, X., Li, Z. et al. Effectively writing low propagation and bend loss waveguides in the silica glass by using a femtosecond laser. Optics Letters, 2022, 47(18): 4766-4769. DOI:10.1364/OL.470670.

Lin, Z., Ji, L., Hong, M. Approximately 30 nm Nanogroove Formation on Single Crystalline Silicon Surface under Pulsed Nanosecond Laser Irradiation. Nano Letters, 2022, 22(17): 7005-7010. DOI:10.1021/acs.nanolett.2c01794.

Liang, S.-Y., Liu, Y.-F., Wang, S.-Y. et al. High-Resolution Patterning of 2D Perovskite Films through Femtosecond Laser Direct Writing. Advanced Functional Materials, 2022, 32(38): 0224957. DOI:10.1002/adfm.202204957.

Zhao, L., Huang, L., Huang, J. et al. Far-Field Parallel Direct Writing of Sub-Diffraction-Limit Metallic Nanowires by Spatially Modulated Femtosecond Vector Beam. Advanced Materials Technologies, 2022, 7(9): 2200125. DOI:10.1002/admt.202200125.

Kai, L., Chen, C., Lu, Y. et al. Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser. Frontiers in Chemistry, 2022. DOI:10.3389/fchem.2022.973570.

Fang, Z., Cheng, Y., Yang, Q. et al. Design of Metal-Based Slippery Liquid-Infused Porous Surfaces (SLIPSs) with Effective Liquid Repellency Achieved with a Femtosecond Laser. Micromachines, 2022, 13(8): 1160. DOI:10.3390/mi13081160.

Yang, T., Li, M., Yang, Q. et al. Femtosecond Laser Fabrication of Submillimeter Microlens Arrays with Tunable Numerical Apertures. Micromachines, 2022, 13(8): 1297. DOI:10.3390/mi13081297.

Wu, G., Zhou, Y., Hong, M. Bilayer-film-decorated microsphere with suppressed interface reflection for enhanced nano-imaging. Optics Express, 2022, 30(16): 28279-28289. DOI:10.1364/OE.456038.

Li, X., Xu, W., Wang, Y. et al. Optical-intensity modulators with PbTe thermoelectric nanopowders for ultrafast photonics. Applied Materials Today, 2022. DOI:10.1016/j.apmt.2022.101546.

Zhang, J., Cheng, Y., Yang, Q. et al. Research Progress of Femtosecond Laser Preparation of Durable Superhydrophobic Surface and Its Application （Invited） | [飞秒激光制备耐久型超疏水表面及其应用的研究进展（特邀）]. Guangzi Xuebao/Acta Photonica Sinica, 2022, 51(7): 0751414. DOI:10.3788/gzxb20225107.0751414.

Yang, B., Wang, H., Peng, S. et al. Precision Layered Stealth Dicing of SiC Wafers by Ultrafast Lasers. Micromachines, 2022, 13(7): 1011. DOI:10.3390/mi13071011.

Banerjee, D., Akkanaboina, M., Ghosh, S. et al. Picosecond Bessel Beam Fabricated Pure, Gold-Coated Silver Nanostructures for Trace-Level Sensing of Multiple Explosives and Hazardous Molecules. Materials, 2022, 15(12): 4155. DOI:10.3390/ma15124155.

Sun, W., Ji, L., Zheng, J. et al. High-Aspect-Ratio Photonic-Crystal Structure of Lithium Niobate Fabricated via Femtosecond Bessel Beam Direct Writing | [飞秒贝塞尔光束直写铌酸锂高深径比光子晶体结]. Zhongguo Jiguang/Chinese Journal of Lasers, 2022, 49(10): 1002503. DOI:10.3788/CJL202249.1002503.

Nova, N.N., Zarzar, L.D. Direct Laser Writing of Graphitic Carbon from Liquid Precursors. Chemistry of Materials, 2022, 34(10): 4602-4612. DOI:10.1021/acs.chemmater.2c00467.

Chen, Z., Zhou, R., Yan, H. et al. Bioinspired robust top-perforated micro-conical array of TC4 surface fabricated by pulsed laser ablation for enhanced anti-icing property. Journal of Materials Science, 2022, 57(19): 8890-8903. DOI:10.1007/s10853-022-07194-9.

Paun, I.A., Calin, B.S., Popescu, R.C. et al. Laser Direct Writing of Dual-Scale 3D Structures for Cell Repelling at High Cellular Density. International Journal of Molecular Sciences, 2022, 23(6): 3247. DOI:10.3390/ijms23063247.

Liao, J., Zhang, D., Li, Z. Advance in femtosecond laser fabrication of flexible electronics | [飞秒激光制备柔性电子器件进展]. Guangdian Gongcheng/Opto-Electronic Engineering, 2022, 49(2): 210388. DOI:10.12086/oee.2022.210388.

Wang, B.-X., Zheng, J.-X., Qi, J.-Y. et al. Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology. Micromachines, 2022, 13(2): 218. DOI:10.3390/mi13020218.

Ouyang, X., Xie, Z., Zhang, M. et al. Laser-induced periodic surface structure for microscale anti-counterfeiting structural colors | [基于激光诱导表面周期结构的微纳防伪结构色]. Guangdian Gongcheng/Opto-Electronic Engineering, 2022, 49(1): 210320. DOI:10.12086/oee.2022.210320.

Tan, D., Sun, K., Li, Z. et al. Photo-processing of perovskites: current research status and challenges. 2022, 1(11) DOI:10.29026/oes.2022.220014.

Zhang, Z., Yang, Z., Zhao, Z. et al. Multimodal Deep-Learning Framework for Accurate Prediction of Wettability Evolution of Laser-Textured Surfaces. ACS Applied Materials and Interfaces, 2022. DOI:10.1021/acsami.2c21439.

Mao, D., He, Z., Gao, Q. et al. Birefringence-Managed Normal-Dispersion Fiber Laser Delivering Energy-Tunable Chirp-Free Solitons. Ultrafast Science, 2022. DOI:10.34133/2022/9760631.

Deshmukh, S., Goswami, A. Parametric study of microlens array fabricated on polymer substrate through hot embossing with a micro-EDM mould and its optical characterisation. Advances in Materials and Processing Technologies, 2022, 9(3): 875-892. DOI:10.1080/2374068X.2022.2101322.

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